发明名称 三次元構造体、及びその製造方法
摘要 PROBLEM TO BE SOLVED: To provide a structure having a plurality of level differences of different height available as optical elements, and to provide a manufacturing method therefor.SOLUTION: In a three-dimensional stereoscopic structure having a grid-like pattern represented by M row N column in the plan view, difference in height between an m-th row n-th column grid and an (m-1)th row (n-1)th column grid is equal to the absolute value of the sum or difference of the difference in height between an m-th row n-th column grid and an (m-1)th row n-th column grid, and the difference in height between an m-th row n-th column grid and an m-th row (n-1)th column grid. The three-dimensional stereoscopic structure is manufactured by superposition of repeated linear pattern different by 90 degrees.
申请公布号 JP5987384(B2) 申请公布日期 2016.09.07
申请号 JP20120063896 申请日期 2012.03.21
申请人 凸版印刷株式会社 发明人 川下 雅史
分类号 H01L21/027;B29C33/38;B29C59/02 主分类号 H01L21/027
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