摘要 |
Provided are a manufacturing method of catalyst-free substrate grown graphene, catalyst-free substrate grown graphene, and a manufacturing apparatus thereof. The manufacturing method of catalyst-free substrate grown graphene comprises the following steps of: (a) arranging a substrate; (b) supplying carbon-containing gas, and conducting metal organic chemical vapor deposition (MOCVD); and (c) growing graphene on the substrate without having a catalyst layer. |