| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming device and a film forming method, capable of continuously manufacturing laminated films having a high barrier property in which an inorganic film and an organic film are laminated.SOLUTION: A film forming device comprises: a vacuum chamber 11; an evacuating unit 12 which evacuates the inside of the vacuum chamber 11; gas introduction units 14to 14which introduce a gas into the vacuum chamber 11; a control unit 15 which can increase pressure in the vacuum chamber 11 to 10Pa or higher by increasing an amount of the gases introduced by the gas introduction units 14to 14; organic film formation units 20aand 20awhich form an inorganic film on a surface of a film-formed object 50 arranged in the vacuum chamber 11 under pressure of 10Pa or higher; and an organic film formation unit 30 which forms an organic film. The organic film formation unit 30 includes: a material container 31 which is arranged in the vacuum chamber 11 and in which a liquid organic film material 35 is stored; a material coating unit 32 which coats the organic film material 35 in the material container 31 on a surface of the film-formed object 50; and a material hardening unit 36 which hardens the organic film material coated on the surface of the film-formed object 50. |
