| 摘要 |
A measuring probe (300) includes a stylus(300) having a contact part(348) to be in contact with an object (W )to be measured, an axial motion mechanism(310) having a moving member(312) that allows the contact part(348) to move in an axial direction(O), and a rotary motion mechanism(334) having a rotating member(RP) that allows the contact part(348) to move along a plane perpendicular to the axial direction(O) by means of rotary motion. The measuring probe (300) includes a probe main body (302) that incorporates the axial motion mechanism (310), and a probe module(304) that is supported by the probe main body (302), incorporates the rotary motion mechanism (334), and supports the stylus(306). The probe main body (302) and the probe module (304) are detachably coupled to each other with a pair of rollers (312F) and a ball (332B) capable of positioning to each other. This allows adequate detection sensitivity and a restoring force suitable for the stylus (306) to be obtained at a low cost. |
