| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet forming device capable of forming an adhesive sheet roughly equal in shape to a plate-like member from a raw adhesive sheet of a size stuck to the plate-like member and protruding from the outer edge of the plate-like member while suppressing the loss of the plate-like member.SOLUTION: A sheet forming device 1 includes a support table 14 for supporting a wafer WF to which a raw adhesive sheet AS1 of a size protruding from at least a partial outer edge in a rear surface WF2 is stuck from the raw adhesive sheet AS1, and a removing means 20 for removing the protruded part AS3 of the raw adhesive sheet AS1 protruded from the outer edge of the wafer WF. The removing means 20 forms an adhesive sheet AS2 by pulling and removing the protruded part AS3 from the front surface WF1 side of the wafer WF. |
