发明名称 検査画像内の欠陥を検出するためのシステム、方法及びコンピュータプログラム製品
摘要 An analysis system for detection of defects within an inspection image of an inspected object, the inspection image comprising a plurality of pixels, the system including: a computerized segmentation module configured to segmentize the inspection image based on multiple anchor locations and on a mask which defines multiple mask-segments, by assigning each part out of multiple parts of the inspection image to a respective image-segment selected out of a multiple image segments, wherein the multiple image segments correspond to at least one mask-segment of said multiple mask-segments; and a defect detection processor configured to determine a presence of a defect in the inspection image based on the segmentation at least by assessing each pixel out of a plurality of pixels of the inspection image.
申请公布号 JP5981838(B2) 申请公布日期 2016.08.31
申请号 JP20120265750 申请日期 2012.11.15
申请人 アプライド マテリアルズ イスラエル リミテッド 发明人 ミッシェル ダラ−トッレ;ジル シャバット;アディ ダフニ;アミット バティコフ
分类号 G01N21/956;G06T1/00;H01L21/66 主分类号 G01N21/956
代理机构 代理人
主权项
地址