发明名称 |
PELLICLE FRAME AND PROCESS FOR PRODUCING SAME |
摘要 |
The present invention provides a pellicle frame that can prevent generation of haze and reduces a surface glittering defect under irradiation with collected light, and a method of manufacturing the pellicle frame. Specifically, provided are a pellicle frame, including: an aluminum frame material formed of aluminum or an aluminum alloy; and an anodic oxide film on a surface of the aluminum frame material, in which the anodic oxide film includes a film formed by using an alkaline anodic oxidation solution and a film formed by using an acid anodic oxidation solution, and a method of manufacturing the pellicle frame. |
申请公布号 |
EP3062149(A1) |
申请公布日期 |
2016.08.31 |
申请号 |
EP20130895841 |
申请日期 |
2013.10.23 |
申请人 |
NIPPON LIGHT METAL COMPANY, LTD. |
发明人 |
YAMAGUCHI, Takayuki;TAGUCHI, Yoshihiro |
分类号 |
G03F1/64 |
主分类号 |
G03F1/64 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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