发明名称 ガラス基板の研磨方法及び製造方法
摘要 The invention relates to a method for grinding a glass substrate, a method for manufacturing a glass substrate, and a grinding device. The method for grinding the glass substrate and the grinding device capable of obtaining the glass substrate excellent in parallelism are provided. The method for grinding the glass substrate is characterized in that the grinding conditions of the glass substrates are controlled based on electric power or detection values of current of a motor which changes positions of the plurality of glass substrates butt joint with grinding surfaces of a flat panel of the grinding device, so that difference among grinding speeds of the grinding surfaces is reduced. The grinding device comprises the flat panel having the grinding surfaces, a holding member for holding the plurality of glass substrates to be grinded by the grinding surfaces, the motor which changes relative positions of the grinding surfaces and the holding member, and a control part which controls the grinding conditions of the glass substrates based on the electric power or detection values of current of the motor in order to reduce grinding speed difference of the grinding surfaces.
申请公布号 JP5983422(B2) 申请公布日期 2016.08.31
申请号 JP20130008782 申请日期 2013.01.21
申请人 旭硝子株式会社 发明人 木村 宏;伊藤 正文;山口 龍;高野 茂喜;江面 裕行
分类号 B24B37/34;B24B37/015;C03C19/00;G11B5/84 主分类号 B24B37/34
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