| 摘要 |
PROBLEM TO BE SOLVED: To provide a susceptor capable of improving thermal uniformity while suppressing reduction in temperature rising speed and heat utilization efficiency of a susceptor.SOLUTION: A susceptor 100 includes: a plate-shaped first member 10 having a wafer arrangement surface on which a wafer is loaded; and a second member 20 which is laminated on the first member 10 in the direction orthogonal to the wafer arrangement surface and supports the first member 10. The heat transfer coefficient of the first member 10 is higher than that of the second member 20. |
