发明名称 ペリクル収納容器
摘要 PROBLEM TO BE SOLVED: To provide a pellicle storage container that can improve visual examination of a cover in a better yield.SOLUTION: A pellicle storage container 1 includes a pellicle placement table 5 on which a pellicle 3 is placed, and a cover 7 which covers the pellicle placement table 5 from above, the cover 7 having a part whose light transmittance is 60% or lower.
申请公布号 JP5981122(B2) 申请公布日期 2016.08.31
申请号 JP20110243874 申请日期 2011.11.07
申请人 旭化成株式会社 发明人 廣瀬 隆徳;前田 拓郎
分类号 G03F1/66;B65D85/86 主分类号 G03F1/66
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