| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a physical quantity detector provided with a configuration in which alignment of a cantilever with weights is easy.SOLUTION: A manufacturing method for a physical quantity detector includes: a preparation step of preparing a joint portion 12 and a movable portion 13 that are cantilevered and supported by a base portion 10 and are provided with a physical quantity detection element 40 and mass portions 50, 52, 54 and 56; a marking step of forming chromium (Cr) deposition films 62a indicating fixing positions of respective mass portions 50, 52, 54 and 56 on the movable portion 13; an alignment step of aligning lateral surfaces 13c and 13d of the movable portion 13 with edge sides of the respective mass portions 50, 52, 54 and 56, and disposing the respective mass portions 50, 52, 54 and 56 at predetermined positions with respect to the chromium (Cr) deposition films 62a; and a fixing step of fixing the mass portions 50, 52, 54 and 56 to positions of the chromium (Cr) deposition films 62a via thermosetting adhesives 62b. |
