| 摘要 |
An etching liquid which removes a metallic layer disposed on the upper side of a silicide layer, and contains: hydrochloric acid; nitric acid; a sulphonic acid compound; a metal corrosion inhibitor that comprises a compound including a heteroatom; and water. The nickel solubility ratio of a chemical solution not including the metal corrosion inhibitor, to a chemical solution including the metal corrosion inhibitor is 20% or more. (Nickel solubility: nickel powder is added to the etching liquid, and processed for 10 minutes at 60°C. The dissolved concentration of nickel present in the resulting liquid.) Nickel solubility ratio (%) = {1-Sb/Sa}×100. Sa: nickel solubility where the corrosion inhibitor is not included. Sb: nickel solubility where the corrosion inhibitor is included. |
