发明名称 起点座標補正方法
摘要 PROBLEM TO BE SOLVED: To provide an origin coordinate correcting method capable of simply matching origin coordinates in accordance with a rational angle of a rotating shaft and capable of contributing to improvement of operability.SOLUTION: A measurement start position by a stylus of a measurement surface of a glass substrate is set as origin coordinates, and when matching the origin coordinates in accordance with a rotational angle of a rotating shaft for rotating the stylus, coordinates on which processing means is located when the rotational angle of the rotating shaft is 0° are specified as reference coordinates, the rotating shaft is rotated only by a predetermined angle, coordinates on which the processing means is located are specified as first coordinates, the rotating shaft is further rotated in the same direction only by a predetermined angle &thetas;, and coordinates on which the processing means is located are specified as second coordinates. An average distance r from the rotational center of the rotating shaft up to a stylus tip is found out and an offset angle from the reference coordinates up to the second coordinates are found out based on the reference coordinates and the first coordinates, and the first coordinates and the second coordinates. The coordinates of the processing means are transformed to the origin coordinates from the average distance and the offset angle in accordance with a specified rotational angle &thetas; of the rotating shaft.
申请公布号 JP5982194(B2) 申请公布日期 2016.08.31
申请号 JP20120143498 申请日期 2012.06.26
申请人 株式会社アルバック 发明人 滝田 宏一;松崎 純;細谷 悟史;毛留 裕介;小田 晃之
分类号 G01B5/00 主分类号 G01B5/00
代理机构 代理人
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