发明名称 |
DRIVE LASER FOR EUV LIGHT SOURCE |
摘要 |
A device is described herein which may comprise an oscillator having an oscillator cavity length, Lo, and defining an oscillator path; and a multi-pass optical amplifier coupled with the oscillator to establish a combined optical cavity including the oscillator path, the combined cavity having a length, Lcombined, where Lcombined=(N+x)*Lo, where “N” is an integer and “x” is a number between 0.4 and 0.6. |
申请公布号 |
EP2232330(B1) |
申请公布日期 |
2016.08.31 |
申请号 |
EP20080866153 |
申请日期 |
2008.12.05 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
ERSHOV, ALEXANDER, I.;HOFFMAN, JERZY, R.;BOWERING, NORBERT, R.;BYKANOV, ALEXANDER, N. |
分类号 |
G02F1/35;G03F7/20;H01S3/00;H01S3/115;H01S3/223;H01S3/225;H01S3/23;H05G2/00;H05H1/24 |
主分类号 |
G02F1/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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