发明名称 磁気ディスク基板の製造方法
摘要 A magnetic disk substrate production method by which the embedded alumina and the waviness of the substrate surface can be reduced is provided. The magnetic disk substrate production method includes the steps of (1) polishing a polishing surface of a substrate to be polished using a polishing liquid composition A containing alumina particles and water; (2) polishing the polishing surface of the substrate obtained in the step (1) using a polishing liquid composition B containing water and silica particles having an average primary particle size (D50) of 40 to 110 nm and a primary particle size standard deviation of 40 to 60 nm; (3) cleaning the substrate obtained in the step (2); and (4) polishing the polishing surface of the substrate obtained in the step (3) using a polishing liquid composition C containing silica particles and water.
申请公布号 JP5979871(B2) 申请公布日期 2016.08.31
申请号 JP20110289755 申请日期 2011.12.28
申请人 花王株式会社 发明人 浜口 剛吏
分类号 G11B5/84;B24B37/00 主分类号 G11B5/84
代理机构 代理人
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