发明名称 Thermal conditioning fluid pump.
摘要 A pump constructed to pump a two-phase fluid provided with magnetic field responsive particles, comprises a collecting duct constructed to guide the two-phase fluid, a collecting duct magnet system arranged along the collecting duct and configured for generating a magnetic field in at least a part of the collecting duct, a pumping duct constructed to guide the 5 two-phase fluid, a pumping duct inlet being connected to a collecting duct outlet and a pumping duct magnet system arranged along the pumping duct and configured for generating a magnetic field in at least a part of the pumping duct. A pump driver is configured to drive the collecting duct magnet system to generate a spatial repetition of collecting duct magnetic fields moving along a length of the collecting duct, the pump driver further being configured 10 to drive the pumping duct magnet system to generate a spatial repetition of pumping duct magnetic fields moving along a length of the pumping duct. In an embodiment, a magnetic field strength of the pumping duct magnetic field exceeds a magnetic field strength of the collecting duct magnetic fields. 15
申请公布号 NL2015566(A) 申请公布日期 2016.08.31
申请号 NL20152015566 申请日期 2015.10.05
申请人 ASML NETHERLANDS B.V. 发明人 THEODORUS PETRUS MARIA CADEE
分类号 H01L21/02 主分类号 H01L21/02
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