| 摘要 |
PROBLEM TO BE SOLVED: To provide a pellicle frame body capable of suppressing breakage of a coating film when coating is performed by coating material.SOLUTION: A pellicle frame body comprises coating material which forms a coating film having a self-repairing function on a pellicle frame body 2 of a pellicle 1. Thereby, scraping of the coating film P caused by a handling tool or the like is prevented. Consequently, occurrence of breakage such as a crack of the coating film P can be suppressed. |
