THERMAL FLOW METER AND METHOD OF MANUFACTURING THE SAME

摘要

Provided is a thermal flow meter capable of increasing corrosion resistance to alkali liquid and maintaining a measuring rate even if the thermal flow meter is heated when being manufactured or used. The thermal flow meter includes: a measuring pipe (11) formed of a resin material and having an inner flow path (10c) extended along an axis X, wherein the measuring pipe (11) has an inlet (11a) and an outlet (11b); a sensor substrate (12) having a thermal resistant line and a temperature sensing resistant line formed on a detection surface (12d) along the axis X; and a reinforcing plate (13). The sensor substrate (12) is bonded to the measuring pipe (11) along the axis X by an adhesive. The reinforcing plate (13) is bonded to the measuring pipe (11) along the axis X by the adhesive in order for an inner flow path (10c) to be located between the reinforcing plate (13) and the sensor substrate (12).