| 摘要 |
According to the present invention, a manufacturing method of a cavity substrate comprises the following steps of: laminating second and third substrates on upper and lower surfaces of a first substrate to enable an end portion of the first substrate to protrude from the second and third substrates by a first length wherein the first substrate has an opening and additionally an external dimension of the first substrate is formed to be larger than external dimensions of the second and third substrates; and cutting the end portion of the first substrate by a second length shorter than the first length wherein the end portion of the first substrate protrudes from the second and third substrates. |
