| 摘要 |
A first reference pattern has a plurality of patterns, which are arranged periodically in a measurement axis direction and have the same width in the measurement axis direction. The plurality of patterns have the respective different pitches, At least one of the plurality of patterns is smaller in pitch than a first main signal pattern. A second sensor has a plurality of detection regions which are in one-to-one correspondence with the plurality of patterns of the first reference pattern. An addition calculating section calculates an addition signal by adding up output signals of the plurality of detection regions. A square calculating section calculates a squared signal from the addition signal. A judging section outputs a reference signal for determination of a reference position according to signal levels of the squared signal. |
