| 摘要 |
An X-ray generation device which can be efficiently used is provided. The X-ray generation device 1 has an electron gun 3, a target unit T, a tubular portion 5, a reflected electron detector 31, and a coil unit 9, and the target unit T includes a plurality of targets 23, and a plurality of mark portions 27 having a predetermined location relationship with the targets 23 and each having a surface area larger than a surface area of the target 23, when viewed from a normal direction to principal faces of the target unit T. |
