| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor optical modulation element that can be easily manufactured and has a high modulation efficiency, uniform characteristics and high yield.SOLUTION: The semiconductor optical modulation element includes: a substrate; an optical waveguide which is formed of a semiconductor material on the substrate and through which incident light propagates; one connection structure part which is connected to one side face of the optical waveguide and is formed of the semiconductor material; and the other connection structure part which is connected to the other side face of the optical waveguide and is formed of the semiconductor material. The optical waveguide, the one connection structure part and the other connection structure part are formed in the substantially same thickness. A first conductivity type region is formed above the optical waveguide, and a second conductivity type region is formed below the optical waveguide. The first conductivity type region is formed above the one connection structure part, and the second conductivity type region is formed below the other connection structure part. |
