METHOD FOR MANUFACTURING NANOMETRIC OBJECTS USING THE RUPTURE OF A LAYER DEFORMED BY WRINKLES

摘要

A pressure-sensitive sensor including a substrate supporting a piezoelectric layer of a piezoelectric material. The piezoelectric layer includes surface undulations as wrinkles on which pressure is exerted upon use of the sensor. The piezoelectric layer is sandwiched between two electrodes for collecting charges generated by deformation of the piezoelectric layer.