| 发明名称 |
CHEMICAL FILTER |
| 摘要 |
Provided is a chemical filter for silanol compound removal which is capable of efficiently removing a silanol compound in air. The chemical filter for silanol compound removal of the present invention uses an inorganic silica-based porous material such that a pH of a mixed solution obtained by mixing with pure water (content: 5 wt%) is 7 or less as an adsorbent. |
| 申请公布号 |
EP3059000(A1) |
申请公布日期 |
2016.08.24 |
| 申请号 |
EP20140854059 |
申请日期 |
2014.09.30 |
| 申请人 |
NITTA CORPORATION |
发明人 |
SHIGETA, MAKOTO;OHSHIO, MINORU |
| 分类号 |
B01D53/02;B01D53/04;B01J20/10;B01J20/12;B01J20/14;B01J20/16;B01J20/18;B01J20/28;B01J20/30;C01B33/14;C01B39/02;H01L21/027 |
主分类号 |
B01D53/02 |
| 代理机构 |
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