发明名称 電子顕微鏡および電子顕微鏡制御方法
摘要 The calculation unit (210) of this electron microscope (200) performs the following processing: (A) processing in which each observation image obtained using a process in which a sample (231) is observed is associated with an observation condition at the time of imaging of each observation image and the result is stored in a storage unit (213); (B) processing for displaying an observation image (1) of the observation site of the sample (231) at the present time, a predetermined number of history images (3) that are stored in the storage unit (213), and a wide-area image (2) that is one of the history images (3) on a display unit (211); and (C) processing for displaying a predetermined figure (127) in which the relative positions, ranges, and orientations of the observation image (1) and the predetermined number of history images (3) within the wide-area image (2) are indicated within the wide-area image (2). As a result, a user can intuitively recognize the relationship between a whole sample and each observation site on the basis of the observation state (the observation position, orientation, inclination, magnification rate, and the like) of each observation site, and the task of visual searching is thus rendered more efficient and simplified.
申请公布号 JP5977200(B2) 申请公布日期 2016.08.24
申请号 JP20130110882 申请日期 2013.05.27
申请人 株式会社日立ハイテクノロジーズ 发明人 北川 健二;田中 晶;安藤 徹;齋藤 勉
分类号 H01J37/22;H01J37/24;H01J37/28 主分类号 H01J37/22
代理机构 代理人
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