| 摘要 |
PROBLEM TO BE SOLVED: To supply a solar cell in which poor appearance and deterioration of characteristics due to loss of an antireflection film, occurring by a member for holding a substrate, are minimized in the CVD method of a deposition-up system.SOLUTION: The manufacturing method of a solar cell includes an antireflection film formation step for forming an antireflection film on the light-receiving surface of a silicon substrate directing downward, and an electrode formation step for forming an electrode at a predetermined position on the antireflection film. In the antireflection film formation step, the silicon substrate is supported at the position where the electrode is formed. |
