摘要 |
Provided is a thermal flow meter including a measurement tube 11 made of resin having an inlet 11a and an outlet 11b, and an internal flow passage 10c extending along an axis X, a sensor substrate 12 having a heating resistance wire and temperature detecting resistance wires formed on a detection surface 12d along the axis X, and a reinforcing plate 13. The sensor substrate 12 is bonded to the measurement tube 11 along the axis X with an adhesive, and the reinforcing plate 13 is bonded to the measurement tube 11 along the axis X with the adhesive with the internal flow passage 10c interposed between the sensor substrate 12 and the reinforcing plate 13. |