发明名称 干渉フィルター、光モジュール、及び分析装置
摘要 PROBLEM TO BE SOLVED: To provide an interference filter capable of suppressing performance deterioration due to processing or changes over time.SOLUTION: An interference filter 5 includes a fixed mirror 56 and a movable mirror 57 which are opposed to each other through a gap G. The fixed mirror 56 and the movable mirror 57 contain an alloy film. The alloy film is an Ag-Sm-Cu alloy film containing silver (Ag), samarium (Sm) and copper (Cu) or an Ag-Bi-Nd alloy film containing silver (Ag), bismuth (Bi) and neodymium (Nd).
申请公布号 JP5978506(B2) 申请公布日期 2016.08.24
申请号 JP20140231366 申请日期 2014.11.14
申请人 セイコーエプソン株式会社 发明人 新東 晋;北原 浩司
分类号 G02B26/00;G01J3/26;G01J3/51;G02B5/28 主分类号 G02B26/00
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