| 摘要 |
PROBLEM TO BE SOLVED: To enable dirt on a surface of an inspection workpiece to be detected more accurately.SOLUTION: A visual inspection apparatus of an embodiment comprises: imaging means for taking an image of an inspection surface of an inspection workpiece; calculation means for calculating three-dimensional height data of the inspection surface on the basis of the taken image; extraction means for extracting an area having an unevenness defect different from an unevenness predetermined on the inspection surface on the basis of the calculated three-dimensional height data; and detection means for detecting an area having poor luminance on the inspection surface from areas except the extracted area having the unevenness defect on the basis of the taken image. |
