APPARATUS AND METHOD FOR TESTING PATTERN OF SAMPLE USING VALIDITY IMAGE PROCESSING TECHNIQUE, AND COMPUTER-READABLE RECORDING MEDIUM WITH PROGRAM THEREFOR

摘要

The present invention relates to a device and method for inspecting a pattern of a sample by validating binarization and outline extraction to be applied to the pattern of the sample using a validating image processing technique. The device for inspecting the pattern of the sample using a validating image processing technique, comprises: a binarization processing part which binarizes an image of the sample photographed through a camera by applying a threshold value method, and generates the binarized result image; an outline extraction part which extracts a pattern outline of the sample by applying the generated binarization image to outline trace algorithm; a validation processing part which obtains a validated pattern image by combining the sample image photographed by the camera and the pattern outline of the sample; and a sample output part which outputs the validated pattern.