| 主权项 |
1. A method for aligning and bringing a first substrate into contact with a second substrate comprising the following steps:
fixing a first substrate to a first holder and second substrate to a second holder, said second holder being arranged opposite to the first holder, wherein the first and second substrates are arranged between the first and second holders and disposed at a distance A between a first contact surface of the first substrate and a second contact surface of the second substrate, detecting first markings on the first substrate and second markings on the second substrate by at least four detection units, whereupon:
at least two of said at least four detection units are movable in the X-direction and in the Y-direction, andat least two of said at least four second detection units are movable exclusively in a Z-direction that runs crosswise to the X- and Y-directions, aligning the first substrate relative to the second substrate in an X-direction and a Y-direction running crosswise thereto by movement of the holders, and bringing into contact the contact surfaces of the aligned substrates in the Z-direction. |
