COMPOSITE CARRIER AND AUTOMATED THICKNESS MEASUREMENT AND CALIBRATION SYSTEM AND METHOD

摘要

A thickness measurement system includes a composite carrier assembly and a thickness sensor system. The composite carrier assembly includes a sample carrier and a gauge standard carrier. The sample carrier and gauge standard carrier are configured to simultaneously support a sample and a gauge standard, respectively. The thickness sensor system is configured to generate a signal representative of a thickness of the sample and to be calibrated with the gauge standard while the sample and the gauge standard are simultaneously supported by the sample carrier and the gauge standard carrier, respectively.

主权项

1. A thickness measurement system comprising:
a composite carrier assembly including a sample carrier and a gauge standard carrier, said sample carrier and said gauge standard carrier configured to simultaneously support a sample and a gauge standard, respectively; and a thickness sensor system configured to generate a signal representative of a thickness of said sample and to be calibrated with said gauge standard while said sample and said gauge standard are simultaneously supported by said sample carrier and said gauge standard carrier, respectively.