| 摘要 |
The present invention provides a graphene producing apparatus. The graphene producing apparatus according to the present invention comprises: a first cleaning unit which sprays water on a substrate, on which a transfer film, a first graphene layer, a metal base, and a second graphene layer are sequentially stacked, to remove the second graphene layer; a metal base removing unit which is connected with the first cleaning unit and dips the substrate, from which the second graphene layer is removed, in a first etching solution to remove the metal base; and a gas removing unit which is connected with the metal base removing unit and dips the substrate, from which the metal base is removed, in a mixed solution of a second etching solution to remove gases from the first graphene layer. According to the present invention, damage to the graphene layer can be minimized. |
