| 摘要 |
PROBLEM TO BE SOLVED: To provide a slit nozzle capable of reducing air stagnation occurring to a liquid reservoir part.SOLUTION: There is provided a slit nozzle including a plurality of processing liquid supply ports, a plurality of liquid reservoir parts which reserves processing liquid supplied from the plurality of processing liquid supply ports and which are as many as the plurality of processing liquid supply ports, and a slit discharge port which discharges the processing liquid from the plurality of liquid reservoir ports. Internal angles of corner parts in longitudinal sections of the plurality of liquid reservoir parts are all 90° or larger, internal angles of support port corner parts where the processing liquid supply ports are arranged among the corner parts are formed to face the slit discharge port side, and within a range of 90-160°, and the plurality of liquid reservoir parts are coupled together into one chamber on the side of the slit discharge port. |
