| 摘要 |
This sintered-body sputtering target has, as main components thereof, an Fe-Pt alloy and a non-magnetic material, and is characterized by: including at least 50 but not more than 5000 ppm by mass of an element which forms an oxide having a lower standard free energy of formation of an oxide per 1 mol of oxygen than CO (carbon monoxide); and including, as the non-magnetic material, at least one from among carbon, a carbide, and a nitride. The present invention addresses the problem of providing a sputtering target which comprises an Fe-Pt alloy and a non-magnetic material, and with which the amount of particles generated during sputtering is significantly reduced. |
