发明名称 塗布ノズル、塗布装置、及び塗布方法
摘要 PROBLEM TO BE SOLVED: To provide a coating nozzle, a coating device, and a coating method which have improved control accuracy of coating of a coating agent.SOLUTION: A coating nozzle comprises: a nozzle body which includes a supply passage part allowing circulation of a coating agent, and a discharge passage part continuously provided to the supply passage part, extending linearly in a direction different from the direction of the supply passage part, and capable of discharging a coating agent to an object; a suction nozzle which enters into the discharge passage part and is held by the nozzle body so as to be movable between a closed position where the supply passage part is closed and an opened position where the supply passage part is opened, and when located at the closed position, can suck a part of the coating agent discharged from the discharge passage part to the object; and a restriction part which is formed in the nozzle body and when the suction nozzle is located at the closed position, restricts misalignment between an axis of the suction nozzle and an axis of the discharge passage part.
申请公布号 JP5971018(B2) 申请公布日期 2016.08.17
申请号 JP20120173993 申请日期 2012.08.06
申请人 富士通株式会社 发明人 甲斐 智司
分类号 B05C5/02;B05C11/10;B05D1/26;B05D3/00 主分类号 B05C5/02
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