熱アシスト磁気ヘッド検査方法および熱アシスト磁気ヘッド検査装置

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for inspecting a thermally assisted magnetic head that optimizes a positional relation between a near-field light emitting unit and scattered light detection means.SOLUTION: An apparatus for inspecting a thermally assisted magnetic head comprises: scanning type probe microscope means provided with a cantilever whose tip has a probe having its surface formed with a magnetic film; image taking means for taking an image of a heat assisted magnetic head element, in the visual field, mounted on a XY table; scattered light detection means having a light detector for detecting scattered light generated from the probe when the probe is in a generation area of near-field light generated from a near-field light emitting unit formed on the thermally assisted magnetic head element; optical system switching means for mechanically switching between a layout of the image taking means and a layout of the scattered light detection means to enable application of either one of the means; and alignment means for recognizing and processing an image taken by the image taking means to adjust a relative position between the near-field light emitting unit and the scattered light detection means to an appropriate position for detecting the scattered light with the scattered light detection means.