发明名称 |
METHOD AND SYSTEM OF DEBRIS REDUCTION IN ELECTRON-IMPACT X-RAY SOURCES |
摘要 |
A method for generating x-ray radiation, comprising the steps of forming a target jet by urging a liquid substance under pressure through an outlet opening, the target jet propagating through an area of interaction; and directing at least one electron beam onto the target jet in the area of interaction such that the electron beam interacts with the target jet to generate x-ray radiation; wherein the full width at half maximum of the electron beam in the transverse direction of the target jet is about 50% or less of the target jet transverse dimension. A system for carrying out the method is also disclosed. |
申请公布号 |
EP2016608(B1) |
申请公布日期 |
2016.08.17 |
申请号 |
EP20070748112 |
申请日期 |
2007.05.08 |
申请人 |
JETTEC AB |
发明人 |
HERTZ, HANS, M.;OTENDAL, MIKAEL;TUOHIMAA, TOMI |
分类号 |
H01J35/08;H05G2/00 |
主分类号 |
H01J35/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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