| 摘要 |
A magnetic field generator which is used in magnetron sputtering and which includes at least one permanent magnet for adjusting a magnetic field, has a race-track shape comprising straight-line sections and corner sections. The magnetic field generator has, provided on a base thereof comprising a non-magnetic material, bar-shaped central-magnetic-pole members, peripheral-magnetic-pole members disposed so as to surround the central-magnetic-pole members, and a plurality of permanent magnets disposed between the central-magnetic-pole members and the peripheral-magnetic-pole members such that one magnetic pole thereof faces the central-magnetic-pole members and the other magnetic pole thereof faces the peripheral-magnetic-pole members. The plurality of permanent magnets disposed on the straight-line sections are thinner in the direction orthogonal to a target surface than at both end sections of a central section in the magnetization direction. |
