| 摘要 |
PROBLEM TO BE SOLVED: To verify accuracy of overlapping.SOLUTION: An overlapping device includes: a first stage which holds one of a plurality of substrates; a second stage which is disposed facing the first stage, is relatively movable to the first stage, and holds the others of the plurality of substrates; and an observation part which observes alignment marks of the one and the other substrates when positioning the one substrate and the other substrates in a state that the first stage and the second stage hold the plurality of substrates, and observes the alignment marks in a state that the plurality of overlapped substrates are separated from the first stage and are held by the second stage. |
