发明名称 CREATION OF A CRACK-INITIATING POINT OR A CRACKING LINE FOR THE IMPROVED SPLITTING OFF OF A SOLID LAYER FROM A SOLID BODY
摘要 The present invention relates to a method for producing solid layers. The method according to the invention preferably comprises the steps of: providing a solid body (2) for splitting off at least one solid layer (4), creating defects by means of at least one radiation source (18), in particular a laser, in the internal structure of the solid body for predetermining a crack-initiating point, starting from which the solid layer (4) is split off from the solid body (2), and/or creating defects by means of at least the radiation source (18), in particular a laser, in the internal structure of the solid body (2) for predetermining a cracking line, along which the solid layer (4) is split off from the solid body (2), arranging a receiving layer (10) for holding the solid layer (4) on the solid body (2), thermally treating the receiving layer (10) for the creation, in particular mechanical creation, of stresses in the solid body (2), wherein the stresses cause a crack to spread from the crack-initiating point and/or along the cracking line in the solid body (2), detaching the solid layer (4) from the solid body (2).
申请公布号 EP3055447(A1) 申请公布日期 2016.08.17
申请号 EP20140781229 申请日期 2014.10.08
申请人 SILTECTRA GMBH 发明人 DRESCHER, WOLFRAM;RICHTER, JAN
分类号 C30B33/06;B23K26/00;B28D1/22;H01L21/762 主分类号 C30B33/06
代理机构 代理人
主权项
地址