发明名称 磁気トンネル接合デバイスおよび製作
摘要 A magnetic tunnel junction (MTJ) device and fabrication method is disclosed. In a particular embodiment, a method is disclosed that includes forming a magnetic tunnel junction (MTJ) device on a structure that includes a bottom cap layer and a bottom metal-filled trench having a normal axis, the magnetic tunnel junction device including a bottom electrode, magnetic tunnel junction layers, a magnetic tunnel junction seal layer, a top electrode, and a logic cap layer, the magnetic tunnel junction device having an MTJ axis that is offset from the normal axis.
申请公布号 JP5969533(B2) 申请公布日期 2016.08.17
申请号 JP20140085712 申请日期 2014.04.17
申请人 クアルコム,インコーポレイテッド 发明人 シア・リ;スン・エイチ・カン;シャオチュン・ジュウ
分类号 H01L21/8246;H01L27/105;H01L29/82;H01L43/08 主分类号 H01L21/8246
代理机构 代理人
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