| 摘要 |
A method of examining a sample using a charged-particle microscope, comprising the following steps:
- Mounting the sample on a sample holder;
- Using a particle-optical column to direct at least one beam of particulate radiation onto the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample;
- Using a first detector configuration C 1 to detect a first portion of the emitted radiation and produce a first image I 1 based thereupon,
which method comprises the following steps:
- Using at least a second detector configuration C 2 to detect a second portion of the emitted radiation and produce a second image I 2 based thereupon, whereby C 2 is different to C 1 , thus compiling a set S D = {C 1 , C 2 } of detector configurations and a set S I = {I 1 , I 2 } of corresponding images;
- Using computer processing apparatus to automatically compare different members of S I and mathematically identify on the sample at least one occlusion region with an occluded line of sight relative to at least one member of S D . In a particular embodiment:
- Plural members of S I are mathematically fused into a composite reference image IF;
- At least one test image I T is selected from S I ;
- Said occlusion region is identified using a technique that comprises comparing I F to I T and identifying an area in I T in which at least one of the following is observed:
– A reduced correlation between I T and IF;
– A reduced intensity in I T relative to I F . |
