发明名称 ワイヤ放電加工装置とその方法、薄板製造方法および半導体ウエハ製造方法
摘要 PROBLEM TO BE SOLVED: To provide a wire electric discharge machining apparatus capable of restraining reduction in machining precision and speed and reducing costs except for an original cutting processing.SOLUTION: A wire electric discharge machining apparatus comprises: a wire 3 having a plurality of cutting wire parts CL arranged separate from and parallel to each other, an installation table used for installing a work-piece; a power source for machining; a plurality of feeding elements K electrically connected to each of the plurality of the cutting wire parts CL respectively and applying a machining voltage between the plurality of the cutting wire parts CL and the work-piece; a pair of nozzles 8a, 8b which is arranged on both sides of the work-piece in the cutting direction and each of which has a jet port in which the plurality of the cutting wire parts CL are passed through, provided on the work-piece arrangement side and used for jetting machining liquid along the plurality of the cutting wire parts CL, and an opening part provided on the opposite side of the jet port; an outer peripheral constitution member arranged on the outer periphery of the work-piece and forming a sealed space between the work-piece and the nozzles 8a, 8b; and moving means for moving the outer peripheral constitution member relatively to the plurality of the cutting wire parts CL.
申请公布号 JP5968200(B2) 申请公布日期 2016.08.10
申请号 JP20120249713 申请日期 2012.11.13
申请人 三菱電機株式会社 发明人 三宅 英孝;福島 一彦;糸数 篤
分类号 B23H7/02 主分类号 B23H7/02
代理机构 代理人
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