Method to vary dimensions of a substrate during nano-scale manufacturing

摘要

A system to vary dimensions of a template comprising a frame (192) having a central aperture (194), and an actuator sub-assembly (190) including a plurality of lever sub-assemblies (196) mounted to the frame (192); the actuator sub assemblies are operable to apply a force such as to provide aperture (194) with appropriate dimensions to receive template (26).