发明名称 |
Noise reduction method for mems sensors using chopping circuits |
摘要 |
An apparatus includes a capacitance-to-voltage converter circuit configured to be electrically coupled to a micro-electromechanical system (MEMS) sensor circuit. The capacitance-to-voltage converter circuit includes a differential chopping circuit path configured to receive a differential MEMS sensor output signal and invert a polarity of the differential chopping circuit path, and a differential sigma-delta analog to digital converter (ADC) circuit configured to sample the differential MEMS sensor output signal and provide a digital signal representative of a change in capacitance of the MEMS sensor. |
申请公布号 |
EP2647593(B1) |
申请公布日期 |
2016.08.10 |
申请号 |
EP20130001695 |
申请日期 |
2013.04.03 |
申请人 |
FAIRCHILD SEMICONDUCTOR CORPORATION |
发明人 |
KLEKS, JONATHAN ADAM;OPRIS, ION;SENG, JUSTIN |
分类号 |
B81B7/00;H03M3/00 |
主分类号 |
B81B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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