Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.
申请公布号
EP3054469(A1)
申请公布日期
2016.08.10
申请号
EP20150164102
申请日期
2015.04.17
申请人
ANALOG DEVICES GLOBAL
发明人
FITZGERALD, PADRAIG L.;WONG, JO-EY;GOGGIN, RAYMOND C.;STENSON, BERNARD PATRICK;LAMBKIN, PAUL M;SCHIRMER, MARK
