METHOD FOR PRODUCING TRICHLOROSILANE

摘要

In order to produce high-purity trichlorosilane by removing methyldichlorosilane from a mixture (S) containing methyldichlorosilane (CH 3 HSiCl 2 ), tetrachlorosilane (SiCl 4 ), and trichlorosilane (HSiCl 3 ) in the method for producing trichlorosilane of the present invention, a procedure is employed in which chlorine atoms are redistributed between methyldichlorosilane and tetrachlorosilane through catalytic treatment for conversion into trichlorosilane and methyltrichlorosilane (CH 3 SiCl 3 ). Methyldichlorosilane (boiling point: 41 °C) having a boiling point close to that of trichlorosilane (boiling point: 32°C) to be purified is converted into methyltrichlorosilane (boiling point: 66°C) having a higher boiling point through redistribution of chlorine atoms between methyldichlorosilane and tetrachlorosilane, achieving easy removal of impurities.