| 摘要 |
FIELD: chemistry.SUBSTANCE: invention can be used for making superconducting tunnel junctions, Josephson junctions. Invention core means that without breaking the vacuum a three-layer structure of superconductor-insulator-normal metal (SIN contact) is applied; the resist is applied followed by exposure, development; selective chemical or ion etching of the three-layer structure is performed, after release of the three-layer structure the surface is planned by deposition through a mask of dielectric with a thickness equal to the thickness of the three-layer structure, after which the dielectric is removed outside the area of tunnel junctions and a thin film of jumper (absorber) from normal metal or other superconductor is applied, herewith this layer of the jumper is applied on the planned surface and can be much thinner than the previous layers, less than 10 nm.EFFECT: technical result is the possibility of increasing reproducibility of multielement integrated superconducting circuits, removal of restrictions for the shape of the transition area, thickness of the upper electrode, elimination of parasitic short-circuits.4 cl, 1 dwg |
