发明名称 Apparatus for decoding process yield
摘要 Methods, systems, and apparatus, including computer programs encoded on computer storage media, for de-convoluting the contributions of various stages in an industrial system to the yield of the industrial system. One of the methods includes determining, for each unit of output manufactured by the industrial system, the path the output took through the industrial system, a respective count of common and independent stages along its path; determining, the parameters at each stage of the industrial system, a respective estimate of the yield along the path; determining, for each of the plurality of paths through the industrial system, a respective se of stage-specific contribution-factors, wherein the path specific yield is based on the impact of common, independent and transfer stages along the path for the industrial system; and associating, with each of the plurality of paths of the industrial system, the respective path specific contribution-factor for each stage along the path wherein the respective path specific contribution-factor for the path estimates the amount the yield of the output on that path is reduced due to stage specific attributes, in response to overall path yield, where yield is defined as the probability of input successfully emerging as output from the industrial system. <Figure 1>
申请公布号 IES20150022(A2) 申请公布日期 2016.08.10
申请号 IES20150022 申请日期 2015.01.28
申请人 THEIL:1 OPTICS 发明人 COLM VINCENT CRYAN;MARTIN REDINGTON
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